On this paper, The brand new lapping slurry and sprucing slurry are introduced. Plus the deliquescence diploma of CLBO is fallen to cheapest. A fresh Performing technologies can be adopted. Immediately after tough sprucing, the focus of extremely-precision sprucing slurry is enhanced adequately. So does the extremely-precision sharpening pace, as well as wiping speed is faster compared to the deliquescence speed. The CLBO crystal area roughness can obtain 1nm and continue to keep the surface good quality effectively. Access by way of your establishment
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The typical power of the NIR laser however has the likely for being enhanced to tens of watts for example 70 W [26] If your double-move configuration might be used for your Yb:YAG SCF amplifier phase. Consequently, if the conversion effectiveness of 31% from NIR to DUV could be even now managed at this higher electricity condition, the common output ability from the DUV laser at 258 nm may be more than 20 W, which would become a amazing energy amount for the DUV laser and lead to the unanticipated DUV laser machining outcomes. Also, for high-energy DUV laser, the UV damage from the nonlinear crystal, such as the Home windows for CLBO crystal and the mirrors, is an additional essential parameter for lasting and secure operation.
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On another side, the facility scaling on the NIR laser is another part to raise the typical power from the 193-nm DUV laser. Because of the deficiency website of the high-electricity amplification Remedy from the NIR laser (one example is at 1553 nm), nonlinear frequency processes including optical parameter oscillation (OPO) could possibly be applied to establish a wavelength converter by shifting the wavelength from 1 μm to the desired wavelength as well as acquiring relative larger electric power [21]. Not long ago, a diamond Raman laser showed its capability in achieving a high power in addition to a significant conversion effectiveness with the 1st Stokes in the 1-μm laser [22,23], which means the chance to get utilized from the 193-nm DUV laser era as a result of its high Raman attain and huge frequency change.
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The heart beat length of the 2nd Stokes gentle was shortened to 5 ns as demonstrated in Figure 7a, one-shot picture with the oscilloscope, that's a standard phenomenon in Raman laser [44] when the pulse length on the pump laser was 10 ns.
Cesium Lithium Borate (CsLiB6O10 or CLBO) is the simplest non-linear crystal which generates ultraviolet harmonics of your Nd:YAG essential laser wavelength. As a way to improve the harm threshold, low CLBO area roughness, by ultra-precision machining, is needed. As the CLBO crystal has effortless hydroscopic response and micro scratches in machining, ultra-specific machining on the CLBO crystal is actually a difficult complex problem.
The beam profile revealed in Determine 7b demonstrated a superb beam high-quality as one of several merits of Raman laser, which might be effective to deliver a 193-nm DUV laser with a top quality beam.
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